The Semion Single Sensor is placed at any location inside a plasma reactor and measures the energy of ions hitting a surface using a single measurement sensor.
Plasma Parameters Measured:
The Semion Multi-Sensor measures the uniformity of ion energies hitting a surface using a number of plasma measurement sensors.
Plasma Parameters Measured:
The Vertex Single Sensor is placed at any location inside a plasma reactor and measures the ion angular distribution hitting a surface using a single sensor.
Plasma Parameters Measured:
The Vertex Multi-Sensor measures the angle of ions hitting a surface inside a plasma reactor from multiple locations to analyse ion angle uniformity.
Plasma Parameters Measured:
The Quantum is a unique instrument to measure the ratio of ions to neutrals hitting a surface inside a plasma reactor.
Plasma Parameters Measured:
The Quantum is a unique instrument to measure the ratio of ions to neutrals hitting a surface inside a plasma reactor.
Plasma Parameters Measured:
The Langmuir Probe is one of the most common and widely used plasma diagnostics and measures parameters in the bulk of the plasma.
Plasma Parameters Measured:
The Langmuir Spatial Probe uses an automated linear drive to scan across a plasma and take measurements of plasma parameters at different locations.
Plasma Parameters Measured:
The Plato Probe is a planar Langmuir Probe designed to work in deposition plasmas when an insulating film is deposited on the probe surface.
Plasma Parameters Measured:
The Plato Spatial Probe scans across the bulk of a plasma and measures the parameters at different locations even when depositing an insulating layer up to 100 microns thick on the probe surface.
Plasma Parameters Measured:
The Bdot Probe measures the rate of change in the magnetic flux over time in the bulk of the plasma.
Plasma Parameters Measured:
The Bdot Spatial Probe includes an automated linear drive and scans across a plasma to measure the rate of change in the magnetic flux over time.
Plasma Parameters Measured:
The Langmuir Atmospherix Probe measures the key plasma parameters and is designed to work up to atmospheric pressure plasmas e.g. plasma flame and plasma jet.
Plasma Parameters Measured:
The Atmospherix Thermal Probe measures the key plasma parameters and works in atmospheric pressure and high temperature plasma environments e.g. plasma torch.
Plasma Parameters Measured:
The Octiv Mono is an in-line RF power measurement system. It measures a single fundamental frequency and has an accuracy rating of 1%. Each system has a drop down menu with a choice of 5 fundamental frequencies to choose from.
RF Parameters Measured:
The Octiv VI is an in-line RF voltage, current and phase measurement system. It can measure a single fundamental frequencies and its harmonics at 1% accuracy and 1 micro second time resolution. Each system has a drop down menu with a choice of 5 fundamental frequencies to choose from.
RF Parameters Measured:
The Octiv Poly is an in-line RF voltage, current and phase measurement system. It can measure a total of 5 fundamental frequencies simultaneously and harmonics with frequency agility at 1% accuracy and 1μs time resolution.
RF Parameters Measured:
The Octiv Suite is an in-line RF voltage, current and phase measurement system. It can measure a total of 5 fundamental frequencies simultaneously and harmonics with frequency agility at 1% accuracy and 1 micro second time resolution. It can reconstruct the RF wave-form from complex frequency spectra simultaneously and in plasma applications measure ion flux at the substrate position
RF Parameters Measured: