Quality Plasma Generator ready to provide reliable RF output and accurate control to meet your process requirements.
Power options range between 50 Watts and 80,000 Watts (80kW)
Frequency options include 380kHZ, 2MHz, 13.56Mhz, 27.12Mhz and 40.68Mhz.
Packages include:
Quality RF Generators ready to provide reliable RF output and accurate control to meet your process requirements.
Power options range between 50 Watts and 80,000 Watts (80kW)
Frequency options include 380kHZ, 2MHz, 13.56Mhz, 27.12Mhz and 40.68Mhz
Quality ‘Combined’ RF Generators ready to provide reliable RF output and accurate control to meet your process requirements.
These units consist of the RF Generator, the Matching Network and the Matching Network Controller all together in one 2U or 4U box.
Power options range between 50 Watts and 80,000 Watts (80kW)
Frequency options include 380kHZ, 2MHz 13.56Mhz, 27.12Mhz and 40.68Mhz
Quality ‘Compact’ RF Generators ready to provide reliable RF output and accurate control to meet your process requirements.
This compact range of RF Generator is generally suited for insertion into mini-lab systems / plasma systems such as sputter coaters or etchers.
We also produce a compact Automatic Matching Network
Power options range between 50 Watts and 80,000 Watts (80kW)
Frequency options include 13.56Mhz (non standard frequencies are available)
